GNAD420T Precision Lapping&Polishing Equipment
● Digital touch screen control system
● Multi-Machine Control via One Control System
● Vacuum meter and vacuum control switch
● Auto Temperature & cooling Control
● Process parameters USB port storage and call
The GNAD 420T is the advanced generation of precision lapping and polishing machines offering the significant refinement and benefit for material processing application,including Si, SiC, GaN, LiNbO3, InP, GaAs, CZT and MCT etc.
Constructed by aluminium and rigid polyurethane to fully withstand the most rigorous polishing environment, it is suitable for both lapping and chemical polishing process.
All process conditions are controlled via the touch control screen, including: plate speeds, material removal rates, removal amount, driven jig arm, the metered abrasive feed - giving the operator complete control.
SH range precision polishing Jigs are used for holding the samples of widely varied shape while they are lapped and/or polished on GNAD machines. Bluetooth communication with jig test sample’s thickness and material removal rates online with accuracy data is 1 micron.The load is variable from 100-3600g on the heaviest SH jigs,and equipped with Loading Gauge.
Basic operation of the lapping/polishing plate is controlled from the Main Drive section. From here the plate speed is set and displayed on an LCD. This is infinitely variable from 5 to 120 rpm to make sure suitable speed for the process to be selected.
The Abrasive Auto-feed System can include multi feeding channels which is controlled by the control panel to make sure flow of abrasive slurry from the abrasive cylinder, to the lapping plate, via an adjustable slurry chute. The speed of abrasive slurry can be controlled from 1-150ml/min delivered via peristaltic pumps. The equipment is equipped with infrared drip detection and automatic shutdown function. The drip detector automatically stops the plate rotating when the cylinder is empty, thereby avoiding any damage to the specimen by running it on a dry plate.
Fully enclosed equipment with air outlet, built-in cleaning water and gas gun.Safety protection door, the equipment can’t start working without door closing.
The automatic plate flatness control system continually monitors the plate shape and automatically corrects any deviations from the required shape set by the operator.
The jig auto-rotation control system can drive and control jigs rotation speed from 5-120rpm. The sweep range is controlled from 0-100%.The jig has the function of moving back and forth, and the moving length can be adjusted through the touch control screen.The length can be displayed on the in real time.
The auto-clean control system will automatically clean the plate and removable drip tray, the time and feed will be controlled. The timer on the Main Drive panel can be set to run the machine for up to 10 hours. Constant supervision by the operator is unnecessary. It will give operator more freedom as processing will stop automatically after the lapping time or thickness. And It will start automatically after the polishing time or thickness.
Vacuum unit is equipped with dry vacuum pump, and has independent anti-backsuction function, the noise is less than 70dB(A) during normal operation.
The temperature and cooling control system continually monitor the temperature of plate, the accuracy is 1℃.The cooling function
automatically corrects any deviations from the required temperature by the operator.
GNAD420T is suitable for 4 inch (thickness:0.1-1.5mm) samples.
After lapping process,φ50mm TTV＜ ±1μm;φ75mm TTV＜ ±2μm;φ100mm TTV＜ ±3μm.
|Power Supply:||240V 50/60Hz|
|Environment temperature:||20°C ± 5°C|
|Environmental humidity:||< 80%|
|Wafer Capacity:||4” x 1/2/3|
|Plate diameter:||300mm、 350mm、420mm、460mm|
|Jig rotation speed:||5-120rpm|
|Jig Sweep Frequency:||0-100%|
|Work Time:||0-10 hours|
|Abrasive delivery:||≥ 4 feeding channels|
|Barrel capacity:||≥ 6 L|
|Save process parameters:||＞110 pieces|