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Non-Contact Gauging System

 

 

Introduction
The MCF provides a unique 'cushion of air'                                    non-contact means for measuring a wide variety of materials and shapes.
Almost any homogeneous material can be measured using analogue or digital display systems reading to 0.1um.imple to use and set up, all the advantages of electronic systems including tolerance lamps, data capture and spc are available.

Key Features
Gauges any non-porous material
Eliminates contact contamination of delicate surfaces
No burnish marks on superfinished surfaces
Measures to 0.001mm
Gauges cylindrical or spherical shapes
Particularly suited to measurement of plastics, hard rubber, thin film, silicon wafers, and highly polished surfaces
Applications:
Single nozzle application for measuring 'step heights'. Examples include silicon slices mounted on a substrate, tracks on circuit boards and partially coated (plated) surfaces.
Continuous measurement of strip materials such as plastics, tape, film stock etc. The aluminium housing for the lower nozzle provides support for the material. Single nozzle measurement is possible by passing the material over a roller.
 
  Technical data
Measuring arm with fine adjustment
Measuring range: 0-180 mm
Wafer Size:≤8inch wafer
ir Supply: Clean instrument air or other inert gas at 2 bar (Consumption is 0.2cfm)
Display Resolution: 0.1um
Probe Resolution: 2.5um
Repeatability:≤±1um
Linearity: 0.25%
Digital Display: 4.5 digit LED Units - Microns
Final Filtration: 0.5 m (0.00002”) particle size in built filter
Air Gap: 75um (Approx)
Zero Reset: Readout can be electronically zeroed anywhere in the range ±20% of full scale from the mechanical zero
Granite base size:300x210x60 mm